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Millatron Ion Beam Deposition System

MILLATRON IBD with IAD

Techware-Brooks Automation Controll

The Gonoimetry stage is 7" round setup to except a 3" square sample.

Four 5" Round Targets NiFe, Al2O3, CZN, FeMn

DC Power Advanced Energy ID-2500 & ID-3500

CTI- CRYO TORR 8 Cryo Pump

Single Internal Mount 3cm DC Ion Source for deposition.

Single Flange Mount 6cm DC Ion Source for assist.

Three (3) Gas System with MFC's.

Frame- 54" Wide X 34" Deep, 36" Table Height footprint with 21" Electronic Bay.

Chamber - 20" Diameter X 18" Depth, Stainless Steel Water Cooled front & back door.

Shielding Process Chamber, Multiple View ports, with Shutters and Conflat flanged ports
  • do NOT contact me with unsolicited services or offers

post id: 6931445675

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