MILLATRON IBD with IAD
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Techware-Brooks Automation Controll
The Gonoimetry stage is 7" round setup to except a 3" square sample.
Four 5" Round Targets NiFe, Al2O3, CZN, FeMn
DC Power Advanced Energy ID-2500 & ID-3500
CTI- CRYO TORR 8 Cryo Pump
Single Internal Mount 3cm DC Ion Source for deposition.
Single Flange Mount 6cm DC Ion Source for assist.
Three (3) Gas System with MFC's.
Frame- 54" Wide X 34" Deep, 36" Table Height footprint with 21" Electronic Bay.
Chamber - 20" Diameter X 18" Depth, Stainless Steel Water Cooled front & back door.
Shielding Process Chamber, Multiple View ports, with Shutters and Conflat flanged ports